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Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity (UHP) applications.

Diaphragm-sealed valves:

  • Have long cycle life and provide effective shutoff
  • Have actuator options including manual, pneumatic, and locking
  • Are offered in a wide variety of sizes, materials, and configurations

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Shop all diaphragm-sealed valvesBrowse our catalogs

Questions? Locate a sales and service center.

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Shop LD seriesLD Series Catalog

With flow coefficients up to 13 and a variety of body materials and configurations, LD series bulk gas diaphragm valves can support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.

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Working Pressure Up to 300 psig (20.6 bar)
Temperature –20° to 300°F (–28° to 148°C)
Flow Coefficient Up to 13
Body Materials CF3M cast stainless steel, forged and bar stock 316L stainless steel
Diaphragm Material 316L stainless steel
End Connections
Type Swagelok® tube fitting, male VCR® face seal fitting, female NPT, female ISO, tube extension
Size 1/4 to 1 in.; 12 to 25 mm

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Shop DL and DS SeriesDL and DS Series Catalog

DL series and DS series diaphragm valves offer packless, all metal containment for high-purity and ultrahigh-purity applications up to 3500 psig (241 bar).

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Working Pressure Up to 3500 psig (241 bar)
Temperature –100° to 250°F (–73° to 121°C)
Flow Coefficient Up to 0.30
Body Material 316L stainless steel
Diaphragm Material 316 stainless steel
End Connections
Type Swagelok tube fitting, VCR face seal fitting, VCO® O-ring fitting, tube butt weld, tube socket weld
Size 1/4, 3/8, and 1/2 in.; 6 and 8 mm

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Shop DRP SeriesDRP Series Catalog

Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.

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Pressure Rating Up to 100 psig (6.8 bar)
Media Temperature 73° to 212°F (23° to 100°C)
Flow Coefficient Up to 10.2
Body, Diaphragm Material Modified PTFE
End Connections
Type Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell
Size 1/4 to 1 1/4 in. and 6 to 25 mm
Configuration 2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models

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Shop DF SeriesDF Series Catalog

DF series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available with high-flow end connections.

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Working Pressure Vacuum to 300 psig (20.6 bar)
Burst Pressure 3200 psig (220 bar)
Actuation Pressure 70 to 100 psig (4.9 to 6.8 bar)
Temperature –10° to 270°F (–23° to 132°C)
Flow Coefficient 0.62
Body Materials 316L VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type "H" type VCR face seal fitting, VCR face seal fitting, tube butt weld
Size 1/4, 3/8, 1/2 in.; 10 and 12 mm

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Shop DP SeriesDP Series Catalog

With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications.

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Working Pressure Vacuum to 3045 psig (210 bar)
Burst Pressure Up to 12200 psig (840 bar)
Actuation Pressure 60 to 120 psig (4.2 to 8.2 bar)
Temperature –10° to 300°F (–23° to 150°C)
Flow Coefficient 0.20 and 0.27
Body Materials 316L VIM-VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type Swagelok tube fitting, VCR face seal fitting, tube butt weld, modular surface-mount (MSM)
Size 1/4 in.; 6 mm

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DE Series Catalog

DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.

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Working Pressure Vacuum to 125 psig (8.6 bar)
Burst Pressure >3200 psig (220 bar)
Actuation Pressure
Normally Closed 60 to 120 psig (4.1 to 8.2 bar)
Normally Open and 60 to 90 psig (4.1 to 6.2 bar)
Normally Closed with manual
Integral lockout override
Temperature 14° to 150°F (–10° to 65°C)
Flow Coefficient 0.3
Body Materials 316L VIM-VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type 1.125 in. modular surface mount (MSM)
Configurations 2-port and 3-port

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DH Series Catalog

Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.

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Working Pressure Vacuum to 70 psig (4.8 bar)
Burst Pressure > 3200 psig (220 bar)
Actuation Pressure 60 to 90 psig (4.1 to 6.2 bar)
Temperature 20° to 220°C (70° to 428°F)
Flow Coefficient
"H" type VCR® Connections 0.60 at 20°C (70°F)
0.40 at 220°C (428°F)
VCR and all other connections 0.30 at 20°C (70°F)
0.21 at 220°C (428°F)
Modular surface-mount body 0.25 at 20°C (70°F)
0.21 at 220°C (428°F)
Body Material 316L VIM-VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM)
Size 1/4 and 3/8 in.
1.125 and 1.5 in. MSM

Questions? Locate a sales and service center.

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Safe Product Selection: The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.

⚠ Warning: Do not mix/interchange Swagelok products or components not governed by industrial design standards, including Swagelok tube fitting end connections, with those of other manufacturers.
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